Harmonic calibration of quadrature phase interferometry
نویسندگان
چکیده
The two output signals of quadrature phase interferometers allow to benefit both from the high sensitivity interferometry (working inside a fringe) and an extended input range (counting fringes). Their calibration reach linear is traditionally performed using Heydemann's correction, which involves fitting one versus other by ellipse. Here we present alternative methods based on response measurement sinusoidal in time, enables direct with excellent linearity. A ten fold improvement respect usual technique demonstrated optical interferometer measuring deflection scanning force microscopy cantilevers.
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ژورنال
عنوان ژورنال: EPL
سال: 2022
ISSN: ['0295-5075', '1286-4854']
DOI: https://doi.org/10.1209/0295-5075/ac8761